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Micro and Nanosystems

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ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

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Research Article

Study on the Electrical and Geometrical Parameters of Micro Electrical Discharge Machining

Author(s): Asmae Tafraouti*, Yasmina Layouni and Pascal Kleimann

Volume 15, Issue 3, 2023

Published on: 14 September, 2023

Page: [199 - 207] Pages: 9

DOI: 10.2174/1876402915666230606120945

Price: $65

Abstract

Introduction: Micro-Electrical Discharge Machining (μEDM) is a technique for non-contact machining of conductive or semiconductor materials. It is mainly adapted to machining hard materials. Its principle is based on the creation of electrical discharges between the micro tool and the workpiece, which are immersed in a dielectric.

Methods: It is a complementary process to mechanical or laser micromachining techniques or microelectronics (RIE, DRIE, LIGA). These methods can reach a resolution of 50 nm, but their main drawback is that they are mainly dedicated to silicon. The µEDM process depends on several physical, geometrical, and/or electrical parameters that need to be optimized in order to achieve a resolution lower than 5 µm in a reproducible way. The objective of this paper is to study the effect of the applied voltage VEE and the micro-tool diameter on the machining performances (removed volume, lateral gap, machining depth, and crater shape).

Result: The optimal parameters were used during drilling holes. An applied voltage of VEE = 50V was used as an optimal parameter.

Conclusion: Concerning the diameter of the micro tool, we propose to use large diameter wires (Φ=250 µm; Φ=125 µm) during the roughing phase for machining complex structures and small diameter micro tools (Φ=80 µm; Φ=40 µm; Φ=20 µm) during the finishing phase.

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[1]
Heckele, M.; Schomburg, W.K. Review on micro molding of thermoplastic polymers. J. Micromech. Microeng., 2004, 14(3), R1-R14.
[http://dx.doi.org/10.1088/0960-1317/14/3/R01]
[2]
Vaezi, M.; Seitz, H.; Yang, S. A review on 3d micro-additive manufacturing technologies. Int. J. Adv. Manuf. Technol., 2013, 67, 1721-1754.
[3]
Jahan, M.; Rahman, M.; Wong, Y.S. Micro- electrical discharge machining (microedm): Processes, varieties, and applications, comprehensive materials processing; Materials Science and Materials Engineering, 2014.
[4]
Receveur, R.A.M.; Lindemans, F.W.; Fde Rooij, N. Microsystem technologies for implantable applications. In: J. Micromechanics Micro-engineering; , 2007; 17, p. R50.
[http://dx.doi.org/10.1088/0960-1317/17/5/R02]
[5]
Cusanelli, G.; Minello, M.; Torchia, F.; Ammann, W.; Grize, P.E. Properties of microholes for nozzle by micro-edm. 15th International Symposium on ElectroMachining (ISEM XV), 2007.
[6]
Malek, C.K.; Jeannot, J.C.; Froelicher, M. Multi-material micro/nanomanufacturing at FEMTO-innovation. Int. J. Technol. Transf. Commer., 2008, 7(2/3), 209.
[http://dx.doi.org/10.1504/IJTTC.2008.020359]
[7]
de la Iglesia, O.; Sebastián, V.; Mallada, R.; Nikolaidis, G.; Coronas, J.; Kolb, G.; Zapf, R.; Hessel, V.; Santamaría, J. Preparation of Pt/ZSM-5 films on stainless steel microreactors. Catal. Today, 2007, 125(1-2), 2-10.
[http://dx.doi.org/10.1016/j.cattod.2007.03.015]
[8]
Available from: https://www.goodfellow.com
[9]
Tafraouti, A.; Layouni, Y.; Kleimann, P. Electrochemical Etching of Cylindrical Micro- Tools with a High Aspect Ratio. Proceeding on the International Conference Thin Film Technology and Applications, Copenhagen, Denmark 2022.
[10]
Odulio, C.F.; Sison, L.; Escoto, M. Energy saving flyback converter for EDM Applications. TENCON 2005 - 2005 IEEE Region 10 Conference, 2005.
[http://dx.doi.org/10.1109/TENCON.2005.301166]
[11]
Tafraouti, A.; Layouni, Y. Micro Electrical Discharge Machining μEDM: Analysis of the influence of geometrical, physical and electrical parameters on the machining performances. 4th International Conference on Nanomaterials Science and Mechanical Engineering, University of Aveiro Portugal July 6-9 2021, , 2021.
[12]
Tafraouti, A.; Layouni, Y. Micro electrical discharge machining (μEDM): Holes drilling and characterization of the process parameters. J. Mater. Sci. Eng. B., 2021, 11(7-9), 108-115.
[http://dx.doi.org/10.17265/2161-6221/2021.7-9.003]
[13]
Dahmani, R. Optimization of a μEDM Process; PhD, Université de Lyon, 2015.
[14]
Kunieda, M.; Lauwers, B.; Rajurkar, K.P.; Schumacher, B.M. Advancing EDM through fundamental insight into the process. CIRP Ann., 2005, 54(2), 64-87.
[http://dx.doi.org/10.1016/S0007-8506(07)60020-1]
[15]
Sidpara, A.M.; Malayath, G. Micro Electro Discharge Machining Principles and Applications; CRC Press, 2021.

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