Search Result "atomic layer deposition (ALD)"


Review Article

Critical Atomic-level Processing Technologies: Remote Plasma-enhanced Atomic Layer Deposition and Atomic Layer Etching

Journal: Micro and Nanosystems
Volume: 10 Issue: 2 Year: 2018 Page: 76-83
Author(s): Guangjie Yuan,Haohao Li,Bo Shan,Johan Liu

Layer-by-Layer Approach for Design of Chemical Sensors and Biosensors

Journal: Current Organic Chemistry
Volume: 19 Issue: 12 Year: 2015 Page: 1097-1116
Author(s): Ekaterina V. Skorb,Anna V. Volkova,Daria V. Andreeva

Layer-by-Layer Assembled Hybrid Materials for Sustainable Applications

Journal: Current Organic Chemistry
Volume: 18 Issue: 18 Year: 2014 Page: 2315-2333
Author(s): Ekaterina V. Skorb,Anna V. Volkova,Daria V. Andreeva

Heterostructure Growth

Ebook: Physics and Technology of Semiconductor Thin Film-Based Active Elements and Devices
Volume: 1 Year: 2009
Author(s): Halyna Khlyap
Doi: 10.2174/978160805021510901010021

Recent Advances in Chemical Vapor Deposition

Journal: Current Organic Chemistry
Volume: 10 Issue: 9 Year: 2006 Page: 1021-1033
Author(s): Bradley D. Fahlman

Fabrication of Three-Dimensional MIS Nano-Capacitor Based on Nanoimprinted Single Crystal Silicon Nanowire Arrays

Journal: Micro and Nanosystems
Volume: 4 Issue: 4 Year: 2012 Page: 333-338
Author(s): Y. Zhai,M. Palard,L. Mathew,Muhammad M. Hussain,C. G. Willson,E. Tutuc,S. K. Banerjee

Research Article open access plus

Promoted Photoelectrocatalytic Hydrogen Production Performance of TiO2 Nanowire Arrays by Al2O3 Surface Passivation Layer

Journal: Current Catalysis
Volume: 6 Issue: 1 Year: 2017 Page: 50-56
Author(s): Yajun Wang, Weikun Bai, Shanlei Han, Haiquan Wang, Qiaohuan Wu, Juan Chen, Guiyuan Jiang, Zhen Zhao, Chunming Xu, Qing Huan

Recent Developments and Patents on Thin Film Technology

Journal: Recent Patents on Materials Science
Volume: 1 Issue: 3 Year: 2008 Page: 200-208
Author(s): Ioanna Giouroudi, Jurgen Kosel, Cornie Scheffer

Liquid and Solid Precursor Delivery Systems in Gas Phase Processes

Journal: Recent Patents on Materials Science
Volume: 8 Issue: 2 Year: 2015 Page: 91-108
Author(s): Constantin Vahlas,Brigitte Caussat,Wayne L. Gladfelter,François Senocq,Elizabeth J. Gladfelter

Evaporators of Reactive Metals and Droplet Casting

Journal: Recent Patents on Materials Science
Volume: 6 Issue: 3 Year: 2013 Page: 214-228
Author(s): Konstantin A. Chuntonov, Alexey O. Ivanov

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