Search Result "Plasma-enhanced atomic layer deposition"


Review Article

Critical Atomic-level Processing Technologies: Remote Plasma-enhanced Atomic Layer Deposition and Atomic Layer Etching

Journal: Micro and Nanosystems
Volume: 10 Issue: 2 Year: 2018 Page: 76-83
Author(s): Guangjie Yuan,Haohao Li,Bo Shan,Johan Liu

Layer-by-Layer Approach for Design of Chemical Sensors and Biosensors

Journal: Current Organic Chemistry
Volume: 19 Issue: 12 Year: 2015 Page: 1097-1116
Author(s): Ekaterina V. Skorb,Anna V. Volkova,Daria V. Andreeva

Deposition of Thin Films: PECVD Process

Ebook: Silicon Based Thin Film Solar Cells
Volume: 1 Year: 2013
Author(s): Armando Menéndez,Pascal Sánchez,David Gómez
Doi: 10.2174/9781608055180113010006

Recent Advances in Chemical Vapor Deposition

Journal: Current Organic Chemistry
Volume: 10 Issue: 9 Year: 2006 Page: 1021-1033
Author(s): Bradley D. Fahlman

Effect of TiO2 Nanotube Morphology on the Formation of Apatite Layer in Simulated Body Fluid

Journal: Current Nanoscience
Volume: 6 Issue: 3 Year: 2010 Page: 256-261
Author(s): Yanqin Liang, Xianjin Yang, Zhenduo Cui, Shengli Zhu

Chemical-Solution Deposition of Hafnia Films on Self-Assembled Molecular Monolayers

Journal: Current Nanoscience
Volume: 2 Issue: 1 Year: 2006 Page: 13-32
Author(s): Michael Z. Hu, Amy C. DeBaillie, Yayi Wei, Gerold E. Jellison

Ultrathin Alumina Films as Nano-Templates for Metals Deposition

Journal: Current Nanoscience
Volume: 5 Issue: 1 Year: 2009 Page: 58-68
Author(s): Qi-Hui Wu

Computational Modelling of the Volatile Hydride Fragmentation in a Dielectric Barrier Discharge Atomizer

Journal: Combinatorial Chemistry & High Throughput Screening
Volume: 16 Issue: 3 Year: 2013 Page: 210-222
Author(s): Wameath S. Abdul-Majeed,William B. Zimmerman

Biomimetic S-Layer Supported Lipid Membranes

Journal: Current Nanoscience
Volume: 2 Issue: 2 Year: 2006 Page: 143-152
Author(s): Bernhard Schuster, Uwe B. Sleytr

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