Search Result "sputtering target."


Research Article

Sputtering Heterogeneous Tungsten Carbide Targets by Light IonsBombardment

Journal: Current Physics
Volume: 1 Issue: 1 Year: 2024 Page: 43-50
Author(s):

Sputtering of Thin Films

Ebook: Silicon Based Thin Film Solar Cells
Volume: 1 Year: 2013
Author(s): Paolo Rava
Doi: 10.2174/9781608055180113010007

Modelling of Reactive Sputter Deposition of Oxynitrides

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Sören Berg,Tomas Nyberg,Diederik Depla
Doi: 10.2174/9781608051564113010005

HfSiON Films Deposited by Radio Frequency Reactive Sputtering

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Li-Ping Feng,Zheng-Tang Liu
Doi: 10.2174/9781608051564113010013

Cu based Sputtering Target Materials for Solar Cell Manufactured by Cold Spray Deposition

Journal: Current Nanoscience
Volume: 10 Issue: 1 Year: 2014 Page: 20-22
Author(s): Kee-Ahn Lee,Myung-Ju Lee,Dong-Yong Park,Hyung-Jun Kim

High Performance AZO Thin Films Deposited by RF Magnetron Sputtering at Low Temperature

Journal: Recent Patents on Materials Science
Volume: 8 Issue: 3 Year: 2015 Page: 260-264
Author(s): Hailin Wang,Yihua Sun,Jian Chen,Liang Fang,Lei Wang,Linlong Ye,Wei Li

A Comprehensive Study of the Properties of Sputtered NbOxNy Thin Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Martin Fenker
Doi: 10.2174/9781608051564113010011

Reactive Gas Pulsing Process for Oxynitride Thin Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Nicolas Martin,Jan Lintymer,Aurélien Besnard,Fabrice Sthal
Doi: 10.2174/9781608051564113010006

Growth and Characterization of Chromium Oxynitride Thin Films Prepared Using Reactive Unbalanced Magnetron Sputtering in Presence of Air as Reactive Gas

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Saïd Agouram,Guy Terwagne,Franz Bodart
Doi: 10.2174/9781608051564113010010

Investigation on the Behaviour of Sputter-Deposited Nanocrystalline Cr3Si Film by Double Cathode Glow Discharge

Journal: Current Nanoscience
Volume: 5 Issue: 4 Year: 2009 Page: 493-502
Author(s): Jiang Xu

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