Search Result "polysilicon mems"


Review Article

On-Chip Testing: A Miniaturized Lab to Assess Sub-Micron Uncertainties in Polysilicon MEMS

Journal: Micro and Nanosystems
Volume: 10 Issue: 2 Year: 2018 Page: 84-93
Author(s): Stefano Mariani,Aldo Ghisi,Ramin Mirzazadeh,Saeed Eftekhar Azam

MEMS in Improved Efficiency

Ebook: Solid State & Microelectronics Technology
Volume: 1 Year: 2023
Author(s):
Doi: 10.2174/9789815079876123010012

Systematic Review Article

A Systematic Review of Reliability Issues in RF-MEMS Switches

Journal: Micro and Nanosystems
Volume: 11 Issue: 1 Year: 2019 Page: 11-33
Author(s): Muhammad Mubasher Saleem,Hamid Nawaz

MEMS Microgripper Actuators and Sensors: The State-of-the-Art Survey

Journal: Recent Patents on Mechanical Engineering
Volume: 6 Issue: 2 Year: 2013 Page: 132-142
Author(s): Yukun Jia, Qingsong Xu

Design and Analysis of a Dual-Mode MEMS Micromirror

Journal: Micro and Nanosystems
Volume: 2 Issue: 1 Year: 2010 Page: 23-31
Author(s): Xingguo Xiong, Tim Dallas, Shubhra Gangopadhyay, Jordan Berg, Temkin Henryk

Perspective

Hybrid Model-Based and Data-Driven Solution for Uncertainty Quantification at the Microscale

Journal: Micro and Nanosystems
Volume: 14 Issue: 4 Year: 2022 Page: 281-286
Author(s): Jose Pablo Quesada-Molina

Recent Innovations in Wall Shear Stress Sensor Technologies

Journal: Recent Patents on Mechanical Engineering
Volume: 1 Issue: 1 Year: 2008 Page: 22-28
Author(s): Ali Etebari

A Highly Accurate Closed-Form Model for Pull-in Voltage of Circular Diaphragms under Large Deflection

Journal: Micro and Nanosystems
Volume: 1 Issue: 2 Year: 2009 Page: 139-146
Author(s): M. Rahman, S. Chowdhury

Theoretical Design and Simulation of a Novel 2D Magnetic Field Sensor with Linear Response and Low Power Consumption

Journal: Micro and Nanosystems
Volume: 5 Issue: 1 Year: 2013 Page: 70-79
Author(s): J. Acevedo-Mijangos,H. Vazquez-Leal,J. Martinez-Castillo,A.L. Herrera-May

Patent Review of Novel Nanostructrued Devices, Nanofabrication Methods and Applications in Nanofluidics and Nanomedicine

Journal: Recent Patents on Nanotechnology
Volume: 6 Issue: 2 Year: 2012 Page: 114-123
Author(s): Che-Yang (Michael) Chen

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