Search Result "electron beam lithography."


Lithography

Ebook: Solid State & Microelectronics Technology
Volume: 1 Year: 2023
Author(s):
Doi: 10.2174/9789815079876123010013

Review Article

Recent Progress in Nano-electronic Devices Based on EBL and IBL

Journal: Current Nanoscience
Volume: 16 Issue: 2 Year: 2020 Page: 157-169
Author(s): Yusheng Pan,Ke Xu

Research Article

Electron Beam Dose and PMMA Thickness Dependent Circularity and Diameter Analysis of Au Nanodots

Journal: Current Nanoscience
Volume: 15 Issue: 5 Year: 2019 Page: 486-491
Author(s): Furkan Kuruoğlu,Özgür Yavuzçetin,Ayşe Erol

Fabrication of Silicon Nanowires Array Using E-beam Lithography Integrated with Microfluidic Channel for pH Sensing

Journal: Current Nanoscience
Volume: 11 Issue: 2 Year: 2015 Page: 239-244
Author(s): M. Nuzaihan M.N.,U. Hashim,A. Rahim Ruslinda,M.K. Md Arshad,M.H.A. Baharin

Developments and Recent Patents on Nano-Imprint Lithography Techniques

Journal: Recent Patents on Mechanical Engineering
Volume: 6 Issue: 1 Year: 2013 Page: 37-47
Author(s): Changhe Li,YuPing Wei,Sheng Wang

Review Article

Nanoimprint Lithography - the Past, the Present and the Future

Journal: Current Nanoscience
Volume: 12 Issue: 6 Year: 2016 Page: 712-724
Author(s): Dongxu Wu, Nitul S. Rajput, Xichun Luo

Injection Moulding Using an Exchangeable Si Mould Insert

Journal: Micro and Nanosystems
Volume: 3 Issue: 3 Year: 2011 Page: 230-235
Author(s): A. Singh, K. Metwally, G. Michel, S. Queste, L. Robert, C. Khan-Malek

Patterned Media Towards Nano-bit Magnetic Recording: Fabrication and Challenges

Journal: Recent Patents on Nanotechnology
Volume: 1 Issue: 1 Year: 2007 Page: 29-40
Author(s): Rachid Sbiaa, Seidikkurippu N. Piramanayagam

Nano-Structured Materials in Plasmonics and Photonics

Journal: Current Nanoscience
Volume: 4 Issue: 3 Year: 2008 Page: 232-235
Author(s): Kosei Ueno, Yukie Yokota, Saulius Juodkazis, Vygantas Mizeikis, Hiroaki Misawa

Review Article

Recent Developments in Focused Ion Beam and its Application in Nanotechnology

Journal: Current Nanoscience
Volume: 12 Issue: 6 Year: 2016 Page: 696-711
Author(s): Zongwei Xu, Yongqi Fu, Wei Han, Dongguang Wei, Huisheng Jiao, Haifeng Gao

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