Search Result "HfSiON films"

HfSiON Films Deposited by Radio Frequency Reactive Sputtering

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Li-Ping Feng,Zheng-Tang Liu
Doi: 10.2174/9781608051564113010013

Application of Oxynitrides for Microelectronic Devices and Gas Barriers

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Yung-Hsien Wu,Jia-Hong Huang
Doi: 10.2174/9781608051564113010016

Subject Index

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Filipe Vaz,Nicolas Martin,Martin Fenker
Doi: 10.2174/9781608051564113010018

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