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Cite this chapter as:
Filipe Vaz, Nicolas Martin, Martin Fenker ;Subject Index, Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications (2013) 1: 342. https://doi.org/10.2174/9781608051564113010018
DOI https://doi.org/10.2174/9781608051564113010018 |
Publisher Name Bentham Science Publisher |