Abstract
This chapter discusses the ion implantation process of silicon processing
technology in depth. The chapter gives an in-depth insight into various aspects of the
ion implantation process and ion-implanted silicon systems commonly encountered
in a silicon process. After reading this chapter, the readers will have a sound
understanding of the ion implantation process and its various aspects.
About this chapter
Cite this chapter as:
Sunipa Roy, Chandan Kumar Ghosh, Sayan Dey, Abhijit Kumar Pal ;Ion Implantation, Solid State & Microelectronics Technology (2023) 1: 332. https://doi.org/10.2174/9789815079876123010011
DOI https://doi.org/10.2174/9789815079876123010011 |
Publisher Name Bentham Science Publisher |