Abstract
This chapter introduces silicon as an electronic material for microelectronic
device fabrication. It discusses, in-depth, the various aspects of crystalline silicon,
wafer manufacturing and their identification techniques. Finally, the various steps
involved in a microfabrication process are also discussed. From this chapter, the
readers are expected to learn how to process a silicon wafer successfully and proceed
with customized device fabrication.
About this chapter
Cite this chapter as:
Sunipa Roy, Chandan Kumar Ghosh, Sayan Dey, Abhijit Kumar Pal ;Silicon, Solid State & Microelectronics Technology (2023) 1: 280. https://doi.org/10.2174/9789815079876123010008
DOI https://doi.org/10.2174/9789815079876123010008 |
Publisher Name Bentham Science Publisher |