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Micro and Nanosystems

Editor-in-Chief

ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

On the Mechanical Properties of Ultrananocrystalline Diamond/Amorphous Carbon Nanocomposite Films

Author(s): Cyril Popov

Volume 6, Issue 1, 2014

Page: [4 - 8] Pages: 5

DOI: 10.2174/187640290601140919122043

Price: $65

Abstract

Microwave plasma chemical vapor deposition from CH4/N2 mixtures has been used for the preparation of ultrananocrystalline diamond/amorphous carbon (UNCD/a-C) composite films on different substrates. We characterized these films with respect to their mechanical properties by nano-indentation, nano-scratch tests and micro- and nanotribometer measurements. The hardness and the Young's modulus of UNCD/a-C on Si, polycrystalline diamond (PCD) and c-BN determined by nanoindentations were on the order of 34-40 GPa and 325-390 GPa, respectively, higher than those of films on TiN. The best adhesion determined by Nano-Scratch tests was observed for the UNCD/a-C films on TiN, most probably as a result of the better adhesion between the silicon substrate and the intermediate layer. The tribotest measurements revealed that the UNCD/a-C films possess friction coefficient below 0.01 in humid air while it increases in dry oxygen, nitrogen and argon atmospheres. Although the presence of an amorphous matrix reduces the hardness by a factor of 2.5-3 in comparison with the monocrystalline diamond, it may be of advantage for the tribological performance of wear protecting coatings by improving their toughness.

Keywords: Adhesion, friction coefficient, hardness, ultrananocrystalline diamond/amorphous carbon composite films.

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