Ion Implantation and Activation

Volume: 2

Ion Implantation Profile in Multi-Layer Structure

Author(s): Kunihiro Suzuki

Pp: 54-68 (15)

DOI: 10.2174/9781608057900113020006

* (Excluding Mailing and Handling)

Abstract

It is important to predict ion implanted profiles in substrates comprised of different materials, where related moment parameters are different. We describe two procedures to generate profiles in multi-layers by using data for each layer, that is, dose matching method, and Rp normalized method, where Rp is the projected range. We show the process in which the methods are applied to multi-layers. Dose matching method is a simple and effective method. However, it provides unstable results sometimes, while Rp normalized method provides stable results.


Keywords: Ion implantation, multi-layer, dose, dose matching method, Rp normalized method, projected range, straggling, profile, effective thickness, Monte Carlo, P, W, Si, SiO2, channeling.

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      • 13. app/Models/UserAccess/UserAccess.php:1266
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      • 15. vendor/laravel/framework/src/Illuminate/Routing/Controller.php:54
      • 16. vendor/laravel/framework/src/Illuminate/Routing/ControllerDispatcher.php:43
      • 17. vendor/laravel/framework/src/Illuminate/Routing/Route.php:260
    • (select j.user_access_id,j.volume_id,j.user_id,j.from_ip,j.to_ip,j.type,j.track,"Trial Access" as access_base_text, CASE j.type WHEN 111 THEN true ELSE false END as terms_popup, "S" as content_download_type, null as restricted_user_access_key, null as restricted_user_access_type, CASE j.track WHEN 0 THEN false ELSE true END as tracksAccessByVolume,"chapter" as access_level, j.chapter_id from `user_access_chapter_trail` as `j` inner join `user_access_info` as `info` on `j`.`user_access_id` = `info`.`user_access_id` where ((j.from_ip <= 316575447 and j.to_ip >=316575447 )) and ((j.from_date <= 1740773643 and j.to_date >= 1740773643 and j.perpetual= 0) or (j.from_date is null and j.to_date is null and j.perpetual= 1)) and j.chapter_id = 5791) union (select j.user_access_id,j.volume_id,j.user_id,j.from_ip,j.to_ip,j.type,j.track,"Subscribed" as access_base_text, false as terms_popup, "S" as content_download_type, null as restricted_user_access_key, null as restricted_user_access_type, CASE j.track WHEN 0 THEN false ELSE true END as tracksAccessByVolume,"chapter" as access_level, j.chapter_id from `user_access_chapter_corporate` as `j` inner join `user_access_info` as `info` on `j`.`user_access_id` = `info`.`user_access_id` where ((j.from_ip <= 316575447 and j.to_ip >=316575447 )) and ((j.from_date <= 1740773643 and j.to_date >= 1740773643 and j.perpetual= 0) or (j.from_date is null and j.to_date is null and j.perpetual= 1)) and j.chapter_id = 5791) union (select j.user_access_id,j.volume_id,j.user_id,j.from_ip,j.to_ip,j.type,j.track,"Token Based Access" as access_base_text, false as terms_popup, "R" as content_download_type, j.uc_id as restricted_user_access_key, "v" as restricted_user_access_type, CASE j.track WHEN 0 THEN false ELSE true END as tracksAccessByVolume,"chapter" as access_level, j.chapter_id from `user_access_chapter_token` as `j` inner join `user_access_info` as `info` on `j`.`user_access_id` = `info`.`user_access_id` where ((j.from_ip <= 316575447 and j.to_ip >=316575447 )) and ((j.from_date <= 1740773643 and j.to_date >= 1740773643 and j.perpetual= 0) or (j.from_date is null and j.to_date is null and j.perpetual= 1)) and j.chapter_id = 5791)
      980μsalphaeurekaselec_live_10_06_2022UserAccess.php#1266
      Backtrace
      • 13. app/Models/UserAccess/UserAccess.php:1266
      • 14. app/Http/Controllers/ChapterController.php:1549
      • 15. vendor/laravel/framework/src/Illuminate/Routing/Controller.php:54
      • 16. vendor/laravel/framework/src/Illuminate/Routing/ControllerDispatcher.php:43
      • 17. vendor/laravel/framework/src/Illuminate/Routing/Route.php:260
    • select b.banner_link, b.banner_name, b.banner_script, b.banner_remarks, b.banner_file_name, b.banner_placement, bd.content_type, bd.content_id from `tbl_banner` as `b` inner join `tbl_banner_detail` as `bd` on `bd`.`banner_id` = `b`.`banner_id` inner join `users` as `u` on `u`.`id` = `b`.`updated_by` where `b`.`banner_ebook` = 1 and `bd`.`content_type` = 'B' and `bd`.`content_id` = 1335 and `b`.`banner_from_date` <= 1740773643 and `b`.`banner_to_date` >= 1740773643 and `b`.`banner_status` = 'A' order by `b`.`banner_id` desc
      11.63msalphaeurekaselec_live_10_06_2022Banner.php#95
      Bindings
      • 0: 1
      • 1: B
      • 2: 1335
      • 3: 1740773643
      • 4: 1740773643
      • 5: A
      Backtrace
      • 13. app/Models/Banner.php:95
      • 14. app/Http/helpers.php:404
      • 17. vendor/laravel/framework/src/Illuminate/Filesystem/Filesystem.php:124
      • 18. vendor/laravel/framework/src/Illuminate/View/Engines/PhpEngine.php:58
      • 19. vendor/laravel/framework/src/Illuminate/View/Engines/CompilerEngine.php:73
    • select count(*) as aggregate from `uc_cart_products` where cart_id='16a9408052394f8941a7dbbb6dfb7b1d'
      340μsalphaeurekaselec_live_10_06_2022Cart.php#271
      Backtrace
      • 15. app/Models/Cart.php:271
      • 16. view::layouts._header:291
      • 18. vendor/laravel/framework/src/Illuminate/Filesystem/Filesystem.php:124
      • 19. vendor/laravel/framework/src/Illuminate/View/Engines/PhpEngine.php:58
      • 20. vendor/laravel/framework/src/Illuminate/View/Engines/CompilerEngine.php:73
    App\Models\Keywords
    15Keywords.php#?
    App\Models\Chapter
    1Chapter.php#?
    App\Models\Ebook
    1Ebook.php#?
        _token
        xEZYQ5IOEToc0QM3EkilA6KMZFDoGAZHfZ2Yvq5Z
        uc_cart_id
        16a9408052394f8941a7dbbb6dfb7b1d
        _previous
        array:1 [ "url" => "http://alpha.eurekaselect.com/chapter/5791" ]
        _flash
        array:2 [ "old" => [] "new" => [] ]
        PHPDEBUGBAR_STACK_DATA
        []
        path_info
        /chapter/5791
        status_code
        200
        
        status_text
        OK
        format
        html
        content_type
        text/html; charset=UTF-8
        request_query
        []
        
        request_request
        []
        
        request_headers
        0 of 0
        array:8 [ "accept-encoding" => array:1 [ 0 => "gzip, deflate" ] "accept" => array:1 [ 0 => "text/html,application/xhtml+xml,application/xml;q=0.9,image/avif,image/webp,image/apng,*/*;q=0.8,application/signed-exchange;v=b3;q=0.7" ] "user-agent" => array:1 [ 0 => "Mozilla/5.0 AppleWebKit/537.36 (KHTML, like Gecko; compatible; ClaudeBot/1.0; +claudebot@anthropic.com)" ] "upgrade-insecure-requests" => array:1 [ 0 => "1" ] "cache-control" => array:1 [ 0 => "no-cache" ] "pragma" => array:1 [ 0 => "no-cache" ] "connection" => array:1 [ 0 => "keep-alive" ] "host" => array:1 [ 0 => "alpha.eurekaselect.com" ] ]
        request_cookies
        []
        
        response_headers
        0 of 0
        array:5 [ "content-type" => array:1 [ 0 => "text/html; charset=UTF-8" ] "cache-control" => array:1 [ 0 => "no-cache, private" ] "date" => array:1 [ 0 => "Fri, 28 Feb 2025 20:14:03 GMT" ] "set-cookie" => array:2 [ 0 => "XSRF-TOKEN=eyJpdiI6IjhRekNaQ3NUOGdKVG9yMUFRTTNnMkE9PSIsInZhbHVlIjoiS25WMmtQdXVDdVRRV3V6UGhoYndYS00wdzRwS0NwYmR0anp6dGkzUTdWVllRVkgySnhCRW5odDRxbkR6Y0k0Yk1DQkdDdDNBWHh2dEhuQ0huU1ZTbXBOM3M2azNSanNrRC9HcUFzb2pIQ0VkN3F2Z2ZUNTNyLzNiZEFhbEg4VlkiLCJtYWMiOiJlNTE0NGI4MGQ3NGNhM2Y3NmY4N2I3Y2M1MGJmNmEyZTMzZTY0YzA4MTUzYzA2NDFhYTAzY2MwMTdmMzYzYmNjIiwidGFnIjoiIn0%3D; expires=Mon, 03 Mar 2025 08:14:03 GMT; Max-Age=216000; path=/; secure; samesite=laxXSRF-TOKEN=eyJpdiI6IjhRekNaQ3NUOGdKVG9yMUFRTTNnMkE9PSIsInZhbHVlIjoiS25WMmtQdXVDdVRRV3V6UGhoYndYS00wdzRwS0NwYmR0anp6dGkzUTdWVllRVkgySnhCRW5odDRxbkR6Y0k0Yk1DQkdDd" 1 => "alphaeurekaselectnet_session=eyJpdiI6IkFTazFWdkFiZzVDWnZTVm5lMkF2SXc9PSIsInZhbHVlIjoiU1Vvb3ViK01NUTJWN2FoZHAyTjg4QVhRZU55U3loeERRUDBKVkU4YWkvSXFJMjdrSjZ0bTRDTkZiLzZ2eXhTNlROWC8zWHNNY21TQ3pON2Rla0pscGhCREdIOVhpcy9zUFE4S05DakplRUplTTl3WXFYMWx4c291aVM1Z2RqWG0iLCJtYWMiOiJiMWE5ZWFiZjYxYTJmN2E1ZmM5YzMxNjFkZDA3MGQxZDQzMjM4NTU2ODkyNjNlODc4OTk4YmRjOWZjZjA3M2NjIiwidGFnIjoiIn0%3D; path=/; secure; httponly; samesite=laxalphaeurekaselectnet_session=eyJpdiI6IkFTazFWdkFiZzVDWnZTVm5lMkF2SXc9PSIsInZhbHVlIjoiU1Vvb3ViK01NUTJWN2FoZHAyTjg4QVhRZU55U3loeERRUDBKVkU4YWkvSXFJMjdrSjZ0bTRDTkZ" ] "Set-Cookie" => array:2 [ 0 => "XSRF-TOKEN=eyJpdiI6IjhRekNaQ3NUOGdKVG9yMUFRTTNnMkE9PSIsInZhbHVlIjoiS25WMmtQdXVDdVRRV3V6UGhoYndYS00wdzRwS0NwYmR0anp6dGkzUTdWVllRVkgySnhCRW5odDRxbkR6Y0k0Yk1DQkdDdDNBWHh2dEhuQ0huU1ZTbXBOM3M2azNSanNrRC9HcUFzb2pIQ0VkN3F2Z2ZUNTNyLzNiZEFhbEg4VlkiLCJtYWMiOiJlNTE0NGI4MGQ3NGNhM2Y3NmY4N2I3Y2M1MGJmNmEyZTMzZTY0YzA4MTUzYzA2NDFhYTAzY2MwMTdmMzYzYmNjIiwidGFnIjoiIn0%3D; expires=Mon, 03-Mar-2025 08:14:03 GMT; path=/; secureXSRF-TOKEN=eyJpdiI6IjhRekNaQ3NUOGdKVG9yMUFRTTNnMkE9PSIsInZhbHVlIjoiS25WMmtQdXVDdVRRV3V6UGhoYndYS00wdzRwS0NwYmR0anp6dGkzUTdWVllRVkgySnhCRW5odDRxbkR6Y0k0Yk1DQkdDd" 1 => "alphaeurekaselectnet_session=eyJpdiI6IkFTazFWdkFiZzVDWnZTVm5lMkF2SXc9PSIsInZhbHVlIjoiU1Vvb3ViK01NUTJWN2FoZHAyTjg4QVhRZU55U3loeERRUDBKVkU4YWkvSXFJMjdrSjZ0bTRDTkZiLzZ2eXhTNlROWC8zWHNNY21TQ3pON2Rla0pscGhCREdIOVhpcy9zUFE4S05DakplRUplTTl3WXFYMWx4c291aVM1Z2RqWG0iLCJtYWMiOiJiMWE5ZWFiZjYxYTJmN2E1ZmM5YzMxNjFkZDA3MGQxZDQzMjM4NTU2ODkyNjNlODc4OTk4YmRjOWZjZjA3M2NjIiwidGFnIjoiIn0%3D; path=/; secure; httponlyalphaeurekaselectnet_session=eyJpdiI6IkFTazFWdkFiZzVDWnZTVm5lMkF2SXc9PSIsInZhbHVlIjoiU1Vvb3ViK01NUTJWN2FoZHAyTjg4QVhRZU55U3loeERRUDBKVkU4YWkvSXFJMjdrSjZ0bTRDTkZ" ] ]
        session_attributes
        0 of 0
        array:5 [ "_token" => "xEZYQ5IOEToc0QM3EkilA6KMZFDoGAZHfZ2Yvq5Z" "uc_cart_id" => "16a9408052394f8941a7dbbb6dfb7b1d" "_previous" => array:1 [ "url" => "http://alpha.eurekaselect.com/chapter/5791" ] "_flash" => array:2 [ "old" => [] "new" => [] ] "PHPDEBUGBAR_STACK_DATA" => [] ]
        ClearShow all
        Date ↕MethodURLData
        #12025-02-28 20:14:03GET/chapter/57911121917