Deposition of Thin Films: PECVD Process

Author(s): Armando Menéndez, Pascal Sánchez and David Gómez

Pp: 29-57 (29)

Abstract

Plasma enhanced chemical vapor deposition technique plays a key role in the development of solar cells based on amorphous and microcrystalline silicon thin films. The deposition process depends strongly on physical and chemical interactions in the plasma. Subsequently, the film properties are dependent on different parameters such as power and frequency, the substrate temperature, the gas pressure and composition, the magnitude and the pattern of the gas flow, the electrode geometry, etc. The aim of this chapter is to discuss all effects of these parameters in detail.

Keywords: Plasma deposition, deposition rate, solar cell, PECVD system, flow rate, high frequency, amorphous silicon, microcrystalline silicon, large area, electrode, production system, roll-to-roll, photovoltaic, thin film, vapor deposition, substrate, microstructure, cluster configuration, in-line configuration, bandgap.