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Micro and Nanosystems

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ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

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Research Article

Manufacturing of Tungsten Micro-tools by Electrochemical Etching: Study of the Electrical Parameters

Author(s): Asmae Tafraouti*, Pascal Kleimann and Yasmina Layouni

Volume 15, Issue 3, 2023

Published on: 02 November, 2023

Page: [215 - 222] Pages: 8

DOI: 10.2174/0118764029258388231023053916

Price: $65

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Abstract

Introduction: This paper aims to fabricate the high aspect ratio tungsten micro-tools with diameters up to 80 µm by electrochemical etching. This process is simple and easy to develop, but it requires a deep study to achieve the fabrication of micro-tools with a diameter of 5 µm.

Methods: In this work, we studied the effect of the pulsed signal parameters used during the electrochemical etching. The parameters studied are VON and TOFF (The applied voltage and the rest phase, respectively).

Results: The experiments show that VON = 0.5 V leads to satisfactory results (validation of the reproducibility, homogeneous etching, and fabrication of micro-tools with a diameter of 80 μm with an initial tungsten wire diameter of 250 μm) by applying an etching charge of 13 C. Voltages VON = 0.1 V and VON = 1 V does not ensure homogeneous etching. A rest phase TOFF = 3 s allows obtaining micro- tools with a diameter of 80 μm in 7 min. For a rest phase of TOFF = 9 s, the etching takes 20 min and the micro-tool diameter is almost the same.

Conclusion: The results of this study will be used in the manufacture of cylindrical micro-tools with a high aspect ratio Fc > 100.

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[1]
Lim, H.S.; Wong, Y.S.; Rahman, M.; Edwin Lee, M.K. A study on the machining of high-aspect ratio micro-structures using micro-EDM. J. Mater. Process. Technol., 2003, 140(1-3), 318-325.
[http://dx.doi.org/10.1016/S0924-0136(03)00760-X]
[2]
Joo, B.Y.; Rhim, S-H.; Oh, S-I. Micro-hole fabrication by mechanical punching process. J. Mater. Process. Technol., 2005, 170(3), 593-601.
[http://dx.doi.org/10.1016/j.jmatprotec.2005.06.038]
[3]
Griffith, J.E.; Grigg, D.A. Dimensional metrology with scanning probe microscopes. J. Appl. Phys., 1993, 74(9), R83-R109.
[http://dx.doi.org/10.1063/1.354175]
[4]
Levick, W.R. Another tungsten microelectrode. Med. Biol. Eng., 1972, 10(4), 510-515.
[http://dx.doi.org/10.1007/BF02474199] [PMID: 4627562]
[5]
Rahman, M.A.; Rahman, M.; Kumar, A.S.; Lim, H.S.; Asad, A.B.M.A. Development of micropin fabrication process using tool based micromachining. Int. J. Adv. Manuf. Technol., 2006, 27(9-10), 939-944.
[http://dx.doi.org/10.1007/s00170-004-2270-9]
[6]
Rahman, M.; Lim, H.S.; Neo, K.S.; Senthil, K.A.; Wong, Y.S.; Li, X.P. Tool-based nanofinishing and micromachining. J. Mater. Process. Technol., 2007, 185(1-3), 2-16.
[http://dx.doi.org/10.1016/j.jmatprotec.2006.03.121]
[7]
Egashira, K.; Mizutani, K. Micro-drilling of monocrystalline silicon using a cutting tool. Precis. Eng., 2002, 26(3), 263-268.
[http://dx.doi.org/10.1016/S0141-6359(01)00113-1]
[8]
Lim, Y.M.; Kim, S.H. Diameter control of an extremely thin cylindrical microprobe by electrochemical etching. Rev. Sci. Instrum., 2000, 71(5), 2166-2168.
[http://dx.doi.org/10.1063/1.1150600]
[9]
Pham, D.T.; Dimov, S.S.; Bigot, S.; Ivanov, A.; Popov, K. Micro-EDM—recent developments and research issues. J. Mater. Process. Technol., 2004, 149(1-3), 50-57.
[http://dx.doi.org/10.1016/j.jmatprotec.2004.02.008]
[10]
Hobara, R. Dynamic electrochemical-etching technique for tungsten tips suitable for multi-tip scanning tunneling microscopes. E-J. Surf. Sci. Nanotechnol., 2007, 5, 94-98.
[11]
Kulakov, M. Capillary and surface effects in the formation of nanosharp tungsten tips by electropolishing. Langmuir, 2009, 25(8), 4462-4468.
[12]
Ju, B.F.; Chen, Y.L.; Ge, Y. The art of electrochemical etching for preparing tungsten probes with controllable tip profile and characteristic parameters. Rev. Sci. Instrum., 2011, 82(1), 013707.
[http://dx.doi.org/10.1063/1.3529880] [PMID: 21280837]
[13]
Tafraouti, A.; Kleimann, P.; Layouni, Y. Fabrication of Tungsten high aspect ratio microtools by electrochemical etching, by controlling the immersed length and the etching charge; Proc. Surfaces, Interfaces and Coatings Technologies, 2021.
[14]
Luttge, R. Nano-and microfabrication for industrial and biomedical applications; Elsevier, 2016.
[15]
Wang, Y.; Zeng, Y.; Qu, N.; Zhu, D. Note: Electrochemical etching of cylindrical nanoprobes using a vibrating electrolyte. Rev. Sci. Instrum., 2015, 86(7), 076103.
[http://dx.doi.org/10.1063/1.4926457]
[16]
Chang, W.T. Method of electrochemical etching of tungsten tips with controllable profiles. Rev. Sci. Instrum., 2012, 83(8), 083704.

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