Abstract
Background: Fluid jet polishing, Airbag polishing, Magnetorheological polishing, and Ion beam polishing are all emerging polishing technologies commonly used for processing optical components, which can be used to manufacture various high-precision and high-quality optical components. Their processing mechanisms are to remove materials by high-speed jet impacting the surface of the workpiece; using a spherical flexible airbag as a polishing tool to obtain a supersmooth surface by adding polishing fluid containing fine abrasives; controlling the magnetic field to form a flexible polishing belt of Magnetorheological fluid, which undergoes relative motion to achieve material removal; using a neutral ion beam to bombard the surface of the workpiece to remove workpiece surface atoms and obtain a super-smooth surface through energy and momentum transfer between ions and workpiece atoms. The characteristics and removal mechanisms of various polishing methods are briefly described, and the advantages and key issues that need to be addressed for each polishing technology are pointed out, and suggestions and prospects for future research, application, and development are also given.
Objective: In order to meet the growing demand for high-precision optical components and massmanufactured optical components, this paper aims to study the various polishing technologies that are continuously improved and suggestions are made for future research and development directions.
Method: This paper reviews the current patents related to various polishing technologies, such as Fluid jet polishing, Airbag polishing, Magnetorheological polishing and Ion beam polishing and other representative polishing technologies.
Results: Various types of polishing technologies have been studied, and the main problem at the current stage is the lack of accuracy. The problem of the polishing device, such as fluid jet polishing, only considers the change of fluid velocity and pressure to construct the removal function model for analysis and summary, and suggestions for the latest research progress of various polishing technologies are given.
Conclusion: The improvement and optimization of polishing technology are beneficial to improving the polishing accuracy and quality of optical components and have great help for the future development of related patents.
Graphical Abstract
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