Search Result "SiC MEMS"


MEMS in Improved Efficiency

Ebook: Solid State & Microelectronics Technology
Volume: 1 Year: 2023
Author(s):
Doi: 10.2174/9789815079876123010012

High-Power and High-Reliability RF MEMS Switch Review

Journal: Recent Patents on Mechanical Engineering
Volume: 7 Issue: 2 Year: 2014 Page: 105-112
Author(s): Wenchao Tian,Jianglei Hu

Status of Silicon Carbide Micromachining, Circuits and Sensing Devices

Journal: Recent Patents on Materials Science
Volume: 4 Issue: 3 Year: 2011 Page: 191-200
Author(s): Wei Tang, Haixia Zhang

Electroplating Copper Mask for Glass Deep Wet Etching in MEMS Relay

Journal: Micro and Nanosystems
Volume: 4 Issue: 2 Year: 2012 Page: 165-169
Author(s): Xiaodan Miao,Xuhan Dai,Dongming Fang,Guifu Ding,Xiaolin Zhao

The Process and Mechanism of Low Temperature Silicon Carbide-to-Silicon Direct Bonding Using Amorphous Hydrogenated Silicon Carbide Films

Journal: Micro and Nanosystems
Volume: 2 Issue: 2 Year: 2010 Page: 100-107
Author(s): Jiangang Du, Christian A. Zorman

Research Article

Optimized V-Shaped Beam Micro-Electrothermal Actuator Using Particle Swarm Optimization (PSO) Technique

Journal: Micro and Nanosystems
Volume: 11 Issue: 1 Year: 2019 Page: 62-67
Author(s): Salah Eldeen Osman,Musaab Zarog

A Highly Accurate Closed-Form Model for Pull-in Voltage of Circular Diaphragms under Large Deflection

Journal: Micro and Nanosystems
Volume: 1 Issue: 2 Year: 2009 Page: 139-146
Author(s): M. Rahman, S. Chowdhury

Colloidal Behavior of Proteins: Effects of the Second Virial Coefficient on Solubility, Crystallization and Aggregation of Proteins in Aqueous Solution

Journal: Current Pharmaceutical Biotechnology
Volume: 6 Issue: 6 Year: 2005 Page: 427-436
Author(s): Joseph J. Valente, Robert W. Payne, Mark C. Manning, W. W. Wilson, Charles S. Henry

Recent Developments in Testing Techniques for Elastic Mechanical Properties of 1-D Nanomaterials

Journal: Recent Patents on Nanotechnology
Volume: 9 Issue: 1 Year: 2015 Page: 33-42
Author(s): Weidong Wang,Shuai Li,Hongti Zhang,Yang Lu

Research Article

The Thermal Time Constant of an Electrothermal Microcantilever Resonator

Journal: Micro and Nanosystems
Volume: 15 Issue: 2 Year: 2023 Page: 102-107
Author(s):

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