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Reactive Gas Pulsing Process for Oxynitride Thin Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Nicolas Martin,Jan Lintymer,Aurélien Besnard,Fabrice Sthal
Doi: 10.2174/9781608051564113010006

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