Search Result "planarization MEMS process"


MEMS in Improved Efficiency

Ebook: Solid State & Microelectronics Technology
Volume: 1 Year: 2023
Author(s):
Doi: 10.2174/9789815079876123010012

Electroplating Copper Mask for Glass Deep Wet Etching in MEMS Relay

Journal: Micro and Nanosystems
Volume: 4 Issue: 2 Year: 2012 Page: 165-169
Author(s): Xiaodan Miao,Xuhan Dai,Dongming Fang,Guifu Ding,Xiaolin Zhao

Planar Cell Polarity Signaling in Collective Cell Movements During Morphogenesis and Disease

Journal: Current Genomics
Volume: 13 Issue: 8 Year: 2012 Page: 609-622
Author(s): Veronica Munoz-Soriano,Yaiza Belacortu,Nuria Paricio

Design of Planar/Coplanar Compact Band-Stop Filter Using SGS Resonators and Multi-Interdigital Capacitors

Journal: Recent Patents on Electrical & Electronic Engineering
Volume: 5 Issue: 3 Year: 2012 Page: 207-210
Author(s): Ahmed Boutejdar,Sonja Boutejdar,Abbas Omar,Edmund Burte

Planar Chip Sensors for Assessment of Nicotine

Journal: Current Analytical Chemistry
Volume: 7 Issue: 3 Year: 2011 Page: 201-206
Author(s): Nashwa M. H. Rizk

Application of Nanofluids to Microsphere Generation Using MEMS Technology

Journal: Recent Patents on Nanotechnology
Volume: 7 Issue: 2 Year: 2013 Page: 133-152
Author(s): Ki-Young Song,Wen-Jun Zhang

Planar Bioadhesive Microdevices: A New Technology for Oral Drug Delivery

Journal: Current Pharmaceutical Biotechnology
Volume: 15 Issue: 7 Year: 2014 Page: 673-683
Author(s): Cade B. Fox,Hariharasudhan D. Chirra,Tejal A. Desai

Theoretical Design and Simulation of a Novel 2D Magnetic Field Sensor with Linear Response and Low Power Consumption

Journal: Micro and Nanosystems
Volume: 5 Issue: 1 Year: 2013 Page: 70-79
Author(s): J. Acevedo-Mijangos,H. Vazquez-Leal,J. Martinez-Castillo,A.L. Herrera-May

Room Temperature Embossing/Punching Process at a Glance: New Evidence for Potential Industrial Applications

Journal: Micro and Nanosystems
Volume: 3 Issue: 3 Year: 2011 Page: 188-198
Author(s): S. Bredeau, J. Bancillon, I. Karweta, L. Federzoni

A Highly Accurate Closed-Form Model for Pull-in Voltage of Circular Diaphragms under Large Deflection

Journal: Micro and Nanosystems
Volume: 1 Issue: 2 Year: 2009 Page: 139-146
Author(s): M. Rahman, S. Chowdhury

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