Search Result "SOI accelerometer"

A Vertical Deformation Mechanics Model for Proof-Mass in Micro-Machined SOI Comb Finger Accelerometers

Journal: Micro and Nanosystems
Volume: 3 Issue: 4 Year: 2011 Page: 326-330
Author(s): Dai Qiang, Liu Zhenkun, Xu Bin, Song Danlu, Cai Yong

Status of Silicon Carbide Micromachining, Circuits and Sensing Devices

Journal: Recent Patents on Materials Science
Volume: 4 Issue: 3 Year: 2011 Page: 191-200
Author(s): Wei Tang, Haixia Zhang

Human Investigations

Ebook: From Microbe to Man
Volume: 1 Year: 2016
Author(s): Janos F. Laszlo
Doi: 10.2174/9781681081021116010010

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