Search Result "silicon carbonitridefilm"

Review Article

Silicon Carbide, Silicon Carbonitride, and Silicon Oxycarbide Thin Films Formed by Remote Hydrogen Microwave Plasma CVD

Journal: Current Organic Chemistry
Volume: 21 Issue: 22 Year: 2017 Page: 2229-2239
Author(s): Agnieszka Walkiewicz-Pietrzykowska,Pawel Uznanski,Aleksander M. Wrobel

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