Login Register Cart 0
Generic placeholder image

Recent Patents on Mechanical Engineering

Editor-in-Chief

ISSN (Print): 2212-7976
ISSN (Online): 1874-477X

Back
Journal Home About Journal Editorial Board Journal Insight Current Issue Volumes/Issues
Subscribe
Research Article

Simulation and Experimental Investigation on Micro Electrochemical Milling of Micro Pattern Structures with High-Speed Helix Electrode

Author(s): Huanghai Kong, Yong Liu*, Kan Wang, Yong Jiang and Xiangming Zhu

Volume 12, Issue 2, 2019

Page: [146 - 157] Pages: 12

DOI: 10.2174/2212797612666190225164706

Price: $65

Abstract

Background: It is always difficult to fabricate micro parts in complicated machines. As one of the most promising micro machining methods, micro electrochemical milling based on the principle of anode electrochemical dissolution is useful for the fabrication of micro structures in hard metal material with advantages irrespective of the material hardness and strength along with no residual stress or heat treatment being observed on the surface of the workpiece.

Objective: The purpose of this paper is to propose a method of micro pattern structures machining by using high-speed helix electrode in micro electrochemical milling, and reveal the relationship of rotating speed of helix electrode and machining efficiency.

Methods: This paper presents a micro electrochemical milling technique for fabricating micro pattern structures with high efficiency. Firstly, a mathematical model of gap electric field under the condition of ultra short pulse power supply is established, and the surface profile change of workpiece in micro electrochemical milling is simulated by COMSOL Multiphysics. Secondly, the gap flow field of the machining under the conditions of different rotating speed of helix electrode is analyzed by simulation. Finally, a set of experiments are carried out to discuss the influence of the rotating speed on maximum feed rate.

Results: The surface profile change of workpiece in micro electrochemical milling is predicted by simulation. The graphs of gas-liquid distribution and velocity vector of the flow field in the machining are obtained. A series of micro pattern structures with a groove width of 150μm are machined successfully.

Conclusion: By using high-speed helix electrode, the electrolyte circulation can be promoted and machining efficiency of micro electrochemical milling can be improved obviously. The experiment results demonstrate that the micro electrochemical milling with high-speed helix electrode is an efficient method to fabricate micro pattern structures. In this article, various patents have been discussed.

Keywords: Helix electrode, high-speed, machining efficiency, micro electrochemical milling, micro pattern structures, ultra short pulse.

« Previous Next »
[1]
Schaller T, Bohn L, Mayer J, Schubert K. Microstructure grooves with a width of less than 50µm cut with ground hard metal micro end mills. Precis Eng 1999; 23: 229-35.
[2]
Friedrich CR, Vasile MJ. Development of the micromilling process for high-aspect-ratio microstructures. J Microelectromech Syst 1996; 5: 33-8.
[3]
McGeough JA, Leu MC, Rajurkar KP, Silva AKMD, Liu Q. Electroforming process and application to micro/macro manufacturing. CIRP Ann-Manuf Techn 2001; 50: 499-514.
[4]
Yu ZY, Masuzawa T, Fujino M. Micro-EDM for three-dimensional cavities-development of uniform wear method. CIRP Ann-Manuf Techn 1998; 47: 169-72.
[5]
Bhattacharyya B, Munda J. Experimental investigation on the influence of electrochemical machining parameters on machining rate and accuracy in micromachining domain. Int J Mach Tools Manuf 2003; 43: 1301-10.
[6]
Bao H, Xu J, Li Y. Aviation-oriented micromachining technology-micro-ECM in pure water. CJA 2008; 21: 455-61.
[7]
Pavlinich SP, Mannapov AR, Gimaev NZ. Electrochemical shaping of aerodynamic seal elements. RuAer (lz VUZ) 2008; 51: 330-8.
[8]
Sen M, Shan H. A review of electrochemical macro- to micro-hole drilling processes. Int J Mach Tools Manuf 2005; 45: 137-52.
[9]
Schuster R, Kirchner V, Allongue P, Ertl G. Electrochemical micromachining. Science 2000; 289: 98-101.
[10]
Schuster R. Electrochemical microstructuring with short voltage pulses. ChemPhysChem 2007; 8: 34-9.
[11]
Kock M, Kirchner V, Schuster R. Electrochemical micromachining with ultrashort voltage pulses-a versatile method with lithographical precision. Electrochim Acta 2003; 48: 3213-9.
[12]
Staemmler L, Hofmann K, Kück H. Hybrid tooling by a combination of high speed cutting and electrochemical milling with ultrashort voltage pulses. Microsyst Technol 2008; 14: 249-54.
[13]
Kim BH, Ryu SH, Choi DK, Chu CN. Micro electrochemical milling. J Micromech Microeng 2004; 15: 124-9.
[14]
Kim BH, Na CW, Lee YS, Choi DK, Chu CN. Micro electrochemical machining of 3D micro structure using dilute sulfuric acid. CIRP Ann-Manuf Techn 2005; 54: 191-4.
[15]
Rathod V, Doloi B, Bhattacharyya B. Fabrication of microgrooves with varied cross-sections by electrochemical micromachining. Int J Adv Manuf Tech 2017; 92: 505-18.
[16]
Juergen F. Electrochemical machining electrode for producing groove structures for e.g. fluid dynamic radial bearing of spindle motor for hard disk drive, has electrically insulating component arranged between two electrically conductive components. DE102011122523 2013.
[17]
Bhattacharyya B, Bikash G. Electrochemical sinking and milling method and allied system for generation of micro features. IN1460KO2013 2015.
[18]
Gunther O, Hog T, Konietzni HJ. Method and device for the electrochemical machining of work pieces. US9364912 2016.
[19]
Takayuki M, Hiroyuki S, Hirotaro H. Electorde, electrochemical machining apparatus using the electrode, electrochemical machining method, and product machined by the method. US2018185943 2018.
[20]
Yuan Y, Han L, Huang D, Su JJ, Tian ZQ, Tian ZW. Electrochemical micromachining under mechanical motion mode. Electrochim Acta 2015; 183: 3-7.
[21]
Xu L, Zhao C. Nanometer-scale accuracy electrochemical micromachining with adjustable inductance. Electrochim Acta 2017; 248: 75-8.
[22]
Liu Y, Zhu D, Zhu L. Micro electrochemical milling of complex structures by using in situ fabricated cylindrical electrode. Int J Adv Manuf Tech 2012; 60: 977-84.
[23]
Liu Y, Zhu D, Zeng YB, Huang SF, Yu HB. Experimental investigation on electrochemical micro machining of complex shape parts. Key Eng Mater 2010; 419: 425-8.
[24]
Liu Y, Zhu D, Zeng Y, Yu H. Development of microelectrodes for electrochemical micromachining. Int J Adv Manuf Technol 2011; 55: 195-203.
[25]
Huai H, Wang J, Dai L, Yan Y, Shen H. Electrochemical Machining (ECM) device of electrochemical machining narrow groove. CN202943344 2013.
[26]
Ming P, Chen J, Chen D, et al. Device for electrochemical machining of anticlamping groove for ultra-thin metal cutting blade. CN106346094 2017.
[27]
Li H, Fu S, Niu S, Qu N. Two-spindle electrochemical grinding and milling machine tool adopting internal electrolyte spraying and method. CN106346096 2017.
[28]
Guo Z, Wen L, Chen C, et al. Electrochemical machining device and appliance for inner wall micro structure. CN107838508 2018.
[29]
Kozak J, Gulbinowicz D, Gulbinowicz Z. The mathematical modeling and computer simulation of pulse electrochemical micromachining. Eng Lett 2008; 16: 556-61.
[30]
Hackert-Oschätzchen M, Kowalick M, Meichsner G, Schubert A. Multiphysics simulation of the electrochemical finishing of micro bores. In Proceedings of the European COMSOL Conference. Milano, Italy October,. 2012.
[31]
Klocke F, Zeis M, Harst S. Modeling and simulation of the Electrochemical Machining (ECM) material removal process for the manufacture of aero engine components. Proc CIRP 2013. 8: 265-70.
[32]
Deconinck D, Damme SV, Albu C. Study of the effects of heat removal on the copying accuracy of the electrochemical machining process. Electrochim Acta 2011; 56: 5642-9.
[33]
Niu J, Liu Y, Guo C, Wang M, Li M. Simulation and experimental study on micro electrochemical drilling with ultra short pulse voltage by using high-speed helix electrode. Recent Pat Eng 2018; 12: 56-63.
[34]
Liu Y, Huang SF. Experimental study on electrochemical drilling of micro holes with high aspect ratio. Adv Mater Res 2014; 941: 1952-5.
[35]
Liu Y, Zeng YB. Electrochemical drilling of deep and small holes with high speed micro electrode. Optic Precis Eng 2014; 22: 608-15.
[36]
Guo C, Liu Y, Wei Z, Niu J. Flow analysis and experimental investigation on micro electrochemical drilling of deep micro-holes. Recent Pat Mech Eng 2017; 10: 51-9.

Rights & Permissions Print Cite
Article Metrics
30
2
1
1
© 2024 Bentham Science Publishers | Privacy Policy