Abstract
Background: Electromachining technology is widely used in micro manufacturing of microshafts, micro-holes, micro-grooves and other micro three-dimensional structures, which contributes to the giant demands for tool electrode. More and more attention has been paid on the electromachining of microelectrodes.
Objective: To meet the increasing requirement of machining quality and machining efficiency of electromachining of microelectrodes, the processing devices and processing methods of electromachining of microelectrodes are continuously improved.
Methods: This paper reviews various current representative patents related to the processing devices and processing methods of electromachining of microelectrodes.
Results: Through comparing different kinds of processing devices and processing methods of electromachining of microelectrodes, the main problems in the current development such as machining efficiency and machining quality of electromachining of micro electrode are concluded and analyzed, and the future development trends of processing devices and processing methods of electromachining of microelectrodes are discussed.
Conclusion: The optimization of processing devices and processing methods of electromachining of microelectrodes is advantageous for solving the problems of machining efficiency and machining quality, and more relevant patents will be invented in the future.
Keywords: Electromachining, microelectrodes, machining efficiency, machining quality, processing devices, processing methods.
[2]
Chen F, Wang BR, Shi W, Zhang YB. An overview of research status of micro EDM technology. Electromachining Mould 2015; 1: 6-10.
[3]
Hu FQ, Wang ZL, Zhao WS, Jia BX, Zhang Y. Research and application of wire electrode discharge grinding (WEDG) technology. JHIT 2003; 35(10): 1171-4.
[4]
Meng J, Bai JC, Li Q, Cao Y. Process study on machining of large length to diameter ratio fine electrode by micro-EDM. Modular Mach Tool Auto MFRG Tech 2016; 1: 140-3.
[5]
Hou WW. Study on micro-EDM technology of precision microstructure.
MA Dissertation, Changchun University of Science and
Technology, Changchun, China, December 2016.
[6]
Zhu BG, Wang ZL. Electrical machining technology of micro shaft. Electromachining Mould 2005; 4: 1-4.
[7]
He XL. Research on the combination machining technology of
EDM and ECM for precision micropore. MA Dissertation, Harbin
Institute of Technology, Harbin, China, July 2012.
[8]
Qu XW. Development and experimental study of complex micro
EDM electrode processing equipment. MA Dissertation, Guangdong
University of Technology, Guangdong, China, May 2016.
[9]
Liu LB, Zhang LY. On-line fabrication and modification of tool electrodes by block electrode reverse copy method. Tool Eng 2014; 48(6): 54-6.
[10]
Liu YT, Guo ZN, He JW. Mechanism and experimental study on composite machining of alloy spherical electric spark and mechanical grinding. MFRG Automation 2014; 21: 8-11.
[11]
Li MH, Liu Y, Guo CS, Wang MY, Niu JR, Niu J. Electrochemical machining model and experiment of micro-column electrode with high rotation precision. Chin J Aeronauti 2016; 37(12): 3864-72.
[12]
Gil R, Sanchez JA, Ortega N, Plaza S, Izquierdo B, Pombo I. High-aspect ratio micro-pin manufacturing using Inverse Slab Electrical Discharge Milling (ISEDM) process. Int J Adv Manuf Technol 2013; 65(9-12): 1459-69.
[13]
Shu XY, Zhang HH, Zhang F, Xie D. High-efficiency micro-EDM processing technology for micro nozzle production. JHUST 2010; 2: 48-51.
[14]
Yin QF, Wang XQ, Wang P, Qian ZQ, Zhou L, Zhang YB. Machining of micro rod electrode by electrical discharge grinding using two block electrodes. J Mater Process Technol 2016; 234: 143-9.
[15]
Hourmand M, Sarhan AAD, Yusof NM. Proposing new machining and measurement techniques of microelectrodes with high aspect ratio for micro EDM drilling of tungsten Carbide using EDM machine. Measurement 2017; 97: 64-78.
[16]
Zhang L, Tong H, Li Y. Precision machining of micro tool electrodes in micro EDM for drilling array micro holes. Precis Eng 2015; 39: 100-6.
[17]
Wang JY, Dong YS. Developing a process chain with WEDG technology and pulse ECM to fabricate ultra micro pins. Procedia CIRP 2016; 42: 815-8.
[18]
Wang Y. Study on rotary electrode wriggling compensation spindle
and micro electrode EDM. MA Dissertation, Harbin Institute of
Technology, Harbin, China, June 2014.
[19]
Ji RJ, Liu YH, Zhang YZ, Cai BP, Li H, Ma JM. Optimizing machining parameters of silicon carbide ceramics with ED milling and mechanical grinding combined process. Int J Adv Manuf Technol 2010; 51(1-4): 195-204.
[20]
He XH, Chen YH, Yang GY, Zhou SR, Lin B. Research on the technology of accurately producing large diameter ratio microelectrodes by reverse copying method. MTF 2018; 46(10): 18-22.
[21]
Ji RJ, Liu YH, Zhang YZ, Wang F. Machining performance of silicon carbide ceramic in end electric discharge milling. Int J Refract Met H 2011; 29(1): 117-22.
[22]
Ji RJ, Cai BP, Ma JM, Li X. Influence of dielectric and machining parameters on the process performance for electric discharge milling of SiC ceramic. Int J Adv Manuf Technol 2012; 59(1-4): 127-36.
[23]
Liu Y, Zhu D, Zeng YB, Yu HB. Development of microelectrodes for electrochemical micromachining. Int J Adv Manuf Technol 2011; 55(1-4): 195-203.
[24]
Wang YF, Zeng YB, Qu NS, Zhu D. Electrochemical etching of cylindrical nanoprobes using a vibrating electrolyte. RSI 2015; 86(7): 076103.
[25]
Kamaraj AB, Sundaram MM. Mathematical modeling and verification of pulse electrochemical; micromachining of microtools. Int J Adv Manuf Technol 2013; 68(5-8): 1055-61.
[26]
He JF, Guo ZN, Lian HS, He CY, Luo HP. Experimental research and simulation of tip effect in electrochemical machining. Modular Mach Tool Auto MFRG Technique 2014; 7: 136-8.
[27]
Zhang L. Study on key techniques of electrochemical machining of
micro-array group electrode group holes. MA Dissertation, Zhejiang
University of Technology, Zhejiang, China, March 2015.
[28]
Zhang H. Research on the electrical discharge grinding device of
micro electrode and the stability of wire conveying system. MA
Dissertation, Harbin Institute of Technology, Harbin, China, July
2013.
[29]
Guo S, Luo HP, Guo ZN. Research progress on on-line machining technology of microelectrodes. MFRG Technol Mach Tool 2011; 8: 73-8.
[30]
Wang ZL, Zhang XD. On-line machining and detection of electrodes in micro EDM. Electromachining Mould 2000; 3: 13-6.
[31]
Geng CM, Zhao WS, Liu JC. Tangential feed method for precision EDM grinding. MFRG Technol Mach Tool 2001; 7: 35-7.
[32]
Jie F, Zhang LX, Wu ZQ, Liu GM, Zhang YB. Research on constant tension fuzzy control of wire electrode in wire electrode grinding system. MFRG Technol Mach Tool 2011; 3: 26-9.
[33]
Zhang Y, Wang ZL, Hu FQ, Jia BX, Li ZY, Zhao WS. Research on machining and detection technology of microelectrodes in micro EDM. MFRG Technol Mach Tool 2004; 8: 97-9.
[35]
Dong P. Design and experimental research of micro electrochemical
machining detection system based on LabVIEW. MA Dissertation,
Shandong University of Technology, Shandong, China, March
2014.
[36]
Wang YK, He XL, Zeng ZQ, Wang ZL. Compound machining
method of EDM and electrochemical. CN102528188 (2012).
[37]
Xie J, Zhang ZR, Zhang HJ, et al. On-line machining method for micro electrode.
CN103878454 (2014).
[38]
Li YM, Zhao LQ, Li JJ, et al. Tool electrode processing technology
and method for processing micropores by using the tool electrode.
CN104874876 (2015).
[39]
Wang YG, Li XP, Wu MH, Wang Z. An on-line grinding
device for micro EDM electrode and its application method.
CN106001801 (2017).
[40]
Wang YK, Chen X, He XL, Wang ZL, Geng XS. On-line
machining method of micro tool electrode based on micro-arc oxidation
for sidewall insulation. CN104227156 (2014).
[41]
Mohri N, Tani T. Microshaft forming method, microshaft formed
by this method, and microshaft forming apparatus. WO2007058110 (2007).
[43]
Peng LQ, Yi FY, Zhang JF, Han Y. Method for manufacturing
extremely long profiled micro electrode for electric discharge
machining. CN1778505 (2006).
[44]
Wu XY, Xu B, Liang X, Luo F, Peng T. Method for manufacturing
three-dimensional micro electric spark electrode.
CN103084676 (2013).
[46]
Bai JC, Zhu GZ, Wang YQ, et al. Wire electrode grinding device for making electrode by micro
spark in line. CN103659525 (2014).
[47]
Chen J, Chen X, Song L. A micro EDM parallel processing
method based on tungsten electrode. CN104803344 (2015).
[48]
Chen J, Chen X. Method for preparing high aspect ratio micro
spark array electrode. CN104909335 (2015).
[49]
Wu ZQ, Zhang YB, Ke R, Yang ZJ, He JG, Zhang LX. In situ machining and dressing device for micro tool electrode.
CN105710465 (2016).
[50]
Prashant T, Florian S. High aspect ratio microelectrode arrays
enabled to have customizable lengths and methods of making the
same. US20120138335 (2012).
[51]
Yang XD, Wu ZB, Chi GX. On line electrical discharge machining
device for micro array electrode and array hole based on
electrostatic induction power supply. CN101885094 (2010).
[52]
Zhang YB, Wang XK, Ji F, He JG, Wu ZQ, Liu GM. Miniature dual function wire electrode grinding device.
CN102601707 (2012).
[53]
Tong H, Li Y, Zhang L. Rotary feed and composite drives spindle
mechanism for micro-EDM machining. CN102513626 (2012).
[54]
Zhao WS. On-line manufacturing method of microelectrodes
based on edge electrode micro-EDM grinding. CN1864922 (2006).
[55]
Wang MH, Gong B, Tong WJ, Xu XF. Device for machining
electrolytically processed micro array electrode of pressure type
circulating jet. CN207534111 (2018).
[56]
Wang MH, He ZW, Zhang L, Yao CY, Zhang QF, Peng W. Method and device for preparing array micro group electrodes
based on cathode optimization. CN104001998 (2014).
[57]
Zeng YB, Wang YF, Qu NS, Zhu D. On-line machining of
micro group wire electrodes. CN103521864 (2014).
[58]
He HD, Qu NS, Zeng YB. Flexible on-line machining of
micro group wire electrode. CN105108250 (2015).
[59]
Wu XY, Lei JG, Zhong JM, Xu B, Guo DJ, Ruan SC. Machining method and device for micro electrochemical machining
tool electrode. CN106424984 (2017).
[60]
Ji H, Cang CW, Li ZY. A method of fine tungsten electrode
prepared cylinder. CN103831492 (2014).
[61]
Wu XY, Lei JG, Guo DJ, Xu B, Wu CZ, Jiang K. Conductive
film electrochemical machining tool electrode and manufacturing
method and manufacturing device thereof. CN106825801 (2017).
[62]
Wang MH, Peng W, Zhang QF. Electrochemical machining of
large diameter ratio disk array array electrodes. CN104511669 (2017).
Related Books
Mechanical Engineering Technologies and Applications
Mechanical Engineering Technologies and Applications
Facets of a Smart City: Computational and Experimental Techniques for Sustainable Urban Development
Soft Robotics
Advances in Manufacturing Technologies and Production Engineering
Advances in Additive Manufacturing Processes
Lean Management Solutions for Contemporary Manufacturing Operations
Mechanical Engineering Technologies and Applications
Global Emerging Innovation Summit (GEIS-2021)
Article Metrics
47
4
1
1