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Abstract
Introduction: A 3D chip-scale solenoid coil was fabricated by micro-electro-mechanical system (MEMS) and wafer-level micro casting technology, and an electromagnetic vibration energy harvester was manufactured with an NdFeB permanent magnet.
Method: Three coils with different turns were designed, namely 45 turns, 90 turns, and 150 turns. The coils had a wire width of 40 microns, a pitch of 25 microns, and a thickness of 150 microns. The permanent magnet was cylindrical with a diameter of 1.8mm. According to the length of the coil, three specifications of 3/6/10mm were selected for the permanent magnet. Special PCB circuit testing tooling was processed to test the actual performance of three kinds of permanent magnet energy harvesters with different specifications. Result: The vibration frequency was set to 10Hz~150Hz, and the acceleration was designed to be 50m/s2~300m/s2. For the energy harvester with 90 turns, a maximum output power of 75μW was obtained under vibration conditions of 100m/s2 & 30Hz. The experimental data showed that vibration frequency, acceleration, and sample size had a certain influence on the energy conversion and output power of vibration. Conclusion: Through the above study, the design and performance of vibration power generation devices can be optimized better to match the actual application requirements of rail transit.
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