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Nanoscience & Nanotechnology-Asia

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ISSN (Print): 2210-6812
ISSN (Online): 2210-6820

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Research Article

Multi-objective Design Optimization of Microdisk Resonator

Author(s): M. Sutagundar *, B.G. Sheeparamatti and D.S. Jangamshetti

Volume 10, Issue 4, 2020

Page: [478 - 485] Pages: 8

DOI: 10.2174/2210681209666190912152649

Price: $65

Abstract

Objective: This paper presents a multi-objective design optimization of MEMS disk resonator using two techniques.

Methods: Determining the optimized dimensions of disk resonator for a particular resonance frequency so as to achieve higher quality factor and lower motional resistance is attempted. One technique used is constraint-based multi-objective optimization using the interior-point algorithm. The second technique is based on multi-objective genetic algorithm.

Results: The algorithms are implemented using MATLAB. The two techniques of optimization are compared.

Conclusion: The developed optimization methods can provide faster design optimization compared to full-wave simulators resulting in significant reduction of design time.

Keywords: MEMS disk resonator, design optimization, multi-objective optimization, interior point method, constrained optimization, genetic algorithm, resonance frequency, quality factor, motional resistance.

Graphical Abstract

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