Search Result "tomic layer deposition (ALD)"
Heterostructure Growth
Ebook: Physics and Technology of Semiconductor Thin Film-Based Active Elements and Devices
Volume: 1 Year: 2009
Author(s): Halyna Khlyap
Doi: 10.2174/978160805021510901010021
Recent Progress in Semiconductor Thin Film Technology
Journal: Recent Patents on Materials Science
Volume: 4 Issue: 1 Year: 2011 Page: 50-55
Author(s): Halyna M. Khlyap, Andre M. Andrukhiv, Petro G. Sydorchuk
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