Search Result "Design of a MEMS Gyroscope with Glass-Silicon-Glass Sandwich Structure"
Design of a MEMS Gyroscope with Glass-Silicon-Glass Sandwich Structure
Journal: Micro and Nanosystems
Volume: 3 Issue: 1 Year: 2011 Page: 26-34
Author(s): Xingguo Xiong, Haifeng Dong
Micro/nanofabrication of IVD/POCT Biosensors
Ebook: Frontiers in Nanobiotechnology
Volume: 1 Year: 2020
Author(s): Huan Hu,Lei Li
Doi: 10.2174/9789811464805120010004
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