Search Result "reactive magnetron sputtering"


Modelling of Reactive Sputter Deposition of Oxynitrides

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Sören Berg,Tomas Nyberg,Diederik Depla
Doi: 10.2174/9781608051564113010005

HfSiON Films Deposited by Radio Frequency Reactive Sputtering

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Li-Ping Feng,Zheng-Tang Liu
Doi: 10.2174/9781608051564113010013

Growth and Characterization of Chromium Oxynitride Thin Films Prepared Using Reactive Unbalanced Magnetron Sputtering in Presence of Air as Reactive Gas

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Saïd Agouram,Guy Terwagne,Franz Bodart
Doi: 10.2174/9781608051564113010010

Exploring the Potential of High Power Impulse Magnetron Sputtering for Tailoring the Chemical Composition and the Properties in Metal Oxynitride Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Kostas Sarakinos
Doi: 10.2174/9781608051564113010007

Fabrication of 3D Nano-structured ITO Films by RF Magnetron Sputtering

Journal: Current Nanoscience
Volume: 5 Issue: 3 Year: 2009 Page: 297-301
Author(s): Gou-Jen Wang, He-Tsing Chen

Sputtering of Thin Films

Ebook: Silicon Based Thin Film Solar Cells
Volume: 1 Year: 2013
Author(s): Paolo Rava
Doi: 10.2174/9781608055180113010007

A Comprehensive Study of the Properties of Sputtered NbOxNy Thin Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Martin Fenker
Doi: 10.2174/9781608051564113010011

Letter Article

An Approach on the Use of Co-sputtered W-DLC Thin Films as Piezoresistive Sensing Materials

Journal: Current Materials Science
Volume: 15 Issue: 1 Year: 2022 Page: 3-9
Author(s): Gabriela Leal,Humber Furlan,Marcos Massi,Mariana Amorim Fraga

The Effect of the Nitrogen Percentage on the Microstructure and Mechanical Properties of Zr-N Coatings

Ebook: Mechanical Engineering Technologies and Applications
Volume: 3 Year: 2023
Author(s):
Doi: 10.2174/9789815179279123030008

Gradual Evolution of the Properties in Titanium Oxynitride Thin Films

Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Jean-Marie Chappé,Nicolas Martin
Doi: 10.2174/9781608051564113010009

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