Search Result "AlOxNy"
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Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Filipe Vaz,Nicolas Martin,Martin Fenker
Doi: 10.2174/9781608051564113010018
Tuneable Properties of Aluminium Oxynitride Thin Films
Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Joel Borges,Nuno P. Barradas,Eduardo Alves,Nicolas Martin,Marie-France Beaufort,Sophie Camelio,Dominique Eyidi,Thierry Girardeau,Fabien Paumier,Jean-Paul Rivière,Filipe Vaz,Luis Marques
Doi: 10.2174/9781608051564113010012
Application of Oxynitrides for Microelectronic Devices and Gas Barriers
Ebook: Metallic Oxynitride Thin Films by Reactive Sputtering and Related Deposition Methods: Process, Properties and Applications
Volume: 1 Year: 2013
Author(s): Yung-Hsien Wu,Jia-Hong Huang
Doi: 10.2174/9781608051564113010016