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Micro and Nanosystems

Editor-in-Chief

ISSN (Print): 1876-4029
ISSN (Online): 1876-4037

Drop-On-Demand Inkjet Printing of SU-8 Polymer

Author(s): Vahid Fakhfouri, Gregory Mermoud, Joo Yeon Kim, Alcherio Martinoli and Juergen Brugger

Volume 1, Issue 1, 2009

Page: [63 - 67] Pages: 5

DOI: 10.2174/1876402910901010063

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Abstract

This paper presents drop-on-demand inkjet printing of SU-8 on functionalized surfaces for direct printing of computer controlled polymer patterns. The high viscosity of SU-8 required an in-depth investigation of the print parameters such as pulse amplitude, pulse length and temperature in the piezo-actuated nozzle. The results show that the optimal drop velocity to obtain a stable printing is ∼2 ms-1 which corresponds to pulse amplitude and length of 220 V and 70-80 μs, respectively. The diameter of the SU-8 drop was reduced from 117 μm on non-treated silicon to 58 µm on a surface terminated by a silane-based self-assembled monolayer.

Keywords: Inkjet, drop-on-demand, SU-8, self-assembled monolayer, functional materials


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