Login Register Cart 0
Generic placeholder image

Recent Patents on Nanotechnology

Editor-in-Chief

ISSN (Print): 1872-2105
ISSN (Online): 2212-4020

Back
Journal Home About Journal Editorial Board Journal Insight Current Issue Volumes/Issues
Subscribe
Research Article

Controlled Growth of Indium Oxide Nanowires for Gas Sensing Application

Author(s): Dang Ngoc Son, Nguyen Van Duy* and Nguyen Duc Hoa*

Volume 17, Issue 2, 2023

Published on: 26 January, 2022

Page: [159 - 164] Pages: 6

DOI: 10.2174/1872210515666210930193811

Price: $65

conference banner
Abstract

Background: The In2O3 nanowires have attracted enormous attention for gas sensor application due to their advantageous features. However, the controlled synthesis of In2O3 nanowires for gas sensors is vital and challenging because the gas sensing performance of the nanowires is strongly dependent on their characteristics.

Methods: Here in this patent, we fabricated In2O3 nanowires on SiO2/Si substrate via a simple thermal vapor deposition method with the Au thin film as the catalyst. The growth temperatures were controlled to obtain desired nanowires of small size. The grown In2O3 nanowires were characterized by scanning electron microscopy, energy-dispersive X-ray spectroscopy, and X-ray diffraction. The ethanol gas sensing properties were tested under the dynamic flow of dry air and analytic gas. The synthesized In2O3 nanowires have the potential for use in ethanol gas sensor application.

Results: In2O3 nanostructures grown at different temperatures ranging from 600 to 900oC have different morphologies. The sample grown at 600oC had a morphology of nanowire, with a diameter of approximately 80 nm and a length of few micrometers. Nanowires grown at 600°C were composed of oxygen (O) and indium (In) elements, with the atomic ratio of [O]/[In] = 3/5. The nanowire was a single phase cubic structure of In2O3 crystal. The In2O3 nanowire sensor showed typical n-type semiconducting sensing properties. The response decreased from 130 to 75 at 100 ppm when the working temperature decreased from 450°C to 350°C.

Conclusion: The nanowires grown at 600°C by the thermal vapor deposition method had the best morphology with a small diameter of about 80 nm and a length of few micrometers. The In2O3 nanowires had a good ability to sense ethanol at varying concentrations in the range of 20 ppm to 100 ppm. The In2O3 nanowires can be used as building blocks for future nanoscale gas sensors.

Keywords: Gas sensor, In2O3 nanowires, 1D nanostructure, growth of In2O3, nanoscale, nanomaterials.

« Previous Next »
Graphical Abstract

[1]
Tian F, Geng S, He L, et al. Interface engineering: PSS-PPy wrapping amorphous Ni-Co-P for enhancing neutral-pH hydrogen evolution reaction performance. Chem Eng J 2021; 417: 129232.
[http://dx.doi.org/10.1016/j.cej.2021.129232]
[2]
Meng X, Lei W, Yang W, Liu Y, Yu Y. Fe3O4 nanoparticles coated with ultra-thin carbon layer for polarization-controlled microwave absorption performance. J Colloid Interface Sci 2021; 600: 382-9.
[http://dx.doi.org/10.1016/j.jcis.2021.05.055] [PMID: 34023699]
[3]
Han G, Sui R, Yu Y, et al. Structure and magnetic properties of the porous Al-substituted barium hexaferrites. J Magn Magn Mater 2021; 528: 167824.
[http://dx.doi.org/10.1016/j.jmmm.2021.167824]
[4]
Huang Y, Li M, Yang W, Yu Y, Hao S. 3D ordered mesoporous cobalt ferrite phosphides for overall water splitting. Sci China Mater 2020; 63: 240-8.
[http://dx.doi.org/10.1007/s40843-019-1171-3]
[5]
Bao S, Wang Y, Wei Z, Yang W, Yu Y, Sun Y. Amino-assisted AHMT anchored on graphene oxide as high performance adsorbent for efficient removal of Cr(VI) and Hg(II) from aqueous solutions under wide pH range. J Hazard Mater 2021; 416: 125825.
[http://dx.doi.org/10.1016/j.jhazmat.2021.125825]
[6]
Hanh NH, Van Duy L, Hung CM, Xuan CT, Van Duy N, Hoa ND. High-performance acetone gas sensor based on Pt–Zn2SnO4 hollow octahedra for diabetic diagnosis. J Alloys Compd 2021; 886: 161284.
[http://dx.doi.org/10.1016/j.jallcom.2021.161284]
[7]
Van Tong P, Hoang Minh L, Van Duy N, Manh Hung C. Porous In2O3 nanorods fabricated by hydrothermal method for an effective CO gas sensor. Mater Res Bull 2021; 137: 111179.
[http://dx.doi.org/10.1016/j.materresbull.2020.111179]
[8]
Jung G, Shin W, Hong S, et al. Comparison of the characteristics of semiconductor gas sensors with different transducers fabricated on the same substrate. Sens Actuators B Chem 2021; 335: 129661.
[http://dx.doi.org/10.1016/j.snb.2021.129661]
[9]
Yang J, Han W, Ma J, et al. Sn doping effect on NiO hollow nanofibers based gas sensors about the humidity dependence for triethylamine detection. Sens Actuators B Chem 2021; 340: 129971.
[http://dx.doi.org/10.1016/j.snb.2021.129971]
[10]
Hung NM, Hung CM, Van Duy N, et al. Significantly enhanced NO2 gas-sensing performance of nanojunction-networked SnO2 nanowires by pulsed UV-radiation. Sens Actuators A Phys 2021; 327: 112759.
[http://dx.doi.org/10.1016/j.sna.2021.112759]
[11]
Zhang B, Bao N, Wang T, et al. High-performance room temperature NO2 gas sensor based on visible light irradiated In2O3 nanowires. J Alloys Compd 2021; 867: 159076.
[http://dx.doi.org/10.1016/j.jallcom.2021.159076]
[12]
Zhou P, Shen Y, Lu W, et al. Highly selective NO2 chemiresistive gas sensor based on hierarchical In2O3 microflowers grown on clinoptilolite substrates. J Alloys Compd 2020; 828: 154395.
[http://dx.doi.org/10.1016/j.jallcom.2020.154395]
[13]
Nguyen TTD, Choi H-N, Ahemad MJ, Van Dao D, Lee I-H, Yu Y-T. Hydrothermal synthesis of In2O3 nanocubes for highly responsive and selective ethanol gas sensing. J Alloys Compd 2020; 820: 153133.
[http://dx.doi.org/10.1016/j.jallcom.2019.153133]
[14]
Hanh NH, Van Duy L, Hung CM, et al. VOC gas sensor based on hollow cubic assembled nanocrystal Zn2SnO4 for breath analysis. Sens Actuators A Phys 2020; 302: 111834.
[http://dx.doi.org/10.1016/j.sna.2020.111834]
[15]
Chava RK, Cho H-Y, Yoon J-M, Yu Y-T. Fabrication of aggregated In2O3 nanospheres for highly sensitive acetaldehyde gas sensors. J Alloys Compd 2019; 772: 834-42.
[http://dx.doi.org/10.1016/j.jallcom.2018.09.183]
[16]
Boehme I, Weimar U, Barsan N. Unraveling the surface chemistry of CO sensing with In2O3 based gas sensors. Sens Actuators B Chem 2021; 326: 129004.
[http://dx.doi.org/10.1016/j.snb.2020.129004]
[17]
Sui N, Zhang P, Zhou T, Zhang T. Selective ppb-level ozone gas sensor based on hierarchical branch-like In2O3 nanostructure. Sens Actuators B Chem 2021; 336: 129612.
[http://dx.doi.org/10.1016/j.snb.2021.129612]
[18]
Singh N, Yan C, Lee PS. Room temperature CO gas sensing using Zn-doped In2O3 single nanowire field effect transistors. Sens Actuators B Chem 2010; 150: 19-24.
[http://dx.doi.org/10.1016/j.snb.2010.07.051]
[19]
Vomiero A, Bianchi S, Comini E, et al. In2O3 nanowires for gas sensors: morphology and sensing characterisation. Thin Solid Films 2007; 515: 8356-9.
[http://dx.doi.org/10.1016/j.tsf.2007.03.034]
[20]
Feng C, Liu X, Wen S, An Y. Controlled growth and characterization of In2O3 nanowires by chemical vapor deposition. Vacuum 2019; 161: 328-32.
[http://dx.doi.org/10.1016/j.vacuum.2018.12.055]
[21]
Yong T-K, Tan S-S, Nee C-H, et al. Pulsed laser deposition of indium tin oxide nanowires in argon and helium. Mater Lett 2012; 66: 280-1.
[http://dx.doi.org/10.1016/j.matlet.2011.08.085]
[22]
Prasad KR, Koga K, Miura N. Electrochemical deposition of nanostructured indium oxide: High-performance electrode material for Redox Supercapacitors. Chem Mater 2004; 16: 1845-7.
[http://dx.doi.org/10.1021/cm0497576]
[23]
Navale ST, Liu C, Yang Z, et al. Low-temperature wet chemical synthesis strategy of In2O3 for selective detection of NO2 down to ppb levels. J Alloys Compd 2018; 735: 2102-10.
[http://dx.doi.org/10.1016/j.jallcom.2017.11.337]
[24]
Ngoc Hoa TT, Van Duy N, Hung CM, Van Hieu N, Hau HH, Hoa ND. Dip-coating decoration of Ag2O nanoparticles on SnO2 nanowires for high-performance H2S gas sensors. RSC Advances 2020; 10: 17713-23.
[http://dx.doi.org/10.1039/D0RA02266G]
[25]
Thai NX, Van Duy N, Hung CM, et al. Prototype edge-grown nanowire sensor array for the real-time monitoring and classification of multiple gases. J Sci Adv Mater Devices 2020; 5: 409-16.
[http://dx.doi.org/10.1016/j.jsamd.2020.05.005]
[26]
Trung DD, Van Toan N, Van Tong P, Van Duy N, Hoa ND, Van Hieu N. Synthesis of single-crystal SnO2 nanowires for NOx gas sensors application. Ceram Int 2012; 38: 6557-63.
[http://dx.doi.org/10.1016/j.ceramint.2012.05.039]
[27]
Van Hieu N, Thuy LTB, Chien ND. Highly sensitive thin film NH3 gas sensor operating at room temperature based on SnO2/MWCNTs composite. Sens Actuators B Chem 2008; 129: 888-95.
[http://dx.doi.org/10.1016/j.snb.2007.09.088]
[28]
Ramos Ramón JA, Pal U, Maestre D, Cremades A. Waveguiding behavior of VLS-grown one-dimensional Ga-doped In2O3 nanostructures. Curr Appl Phys 2018; 18: 785-92.
[http://dx.doi.org/10.1016/j.cap.2018.04.009]
[29]
Zhan Z, Lu J, Song W, Jiang D, Xu J. Highly selective ethanol In2O3-based gas sensor. Mater Res Bull 2007; 42: 228-35.
[http://dx.doi.org/10.1016/j.materresbull.2006.06.006]

Rights & Permissions Print Cite
Article Metrics
5
© 2024 Bentham Science Publishers | Privacy Policy