Abstract
Background: Tribological issues severely confound the smooth operation of moving elements in actuators-based miniaturized devices, e.g., micro-electro-mechanical systems. At micro/- nano scales, surface forces, namely adhesion and friction, manifest strongly and oppose the relative mechanical motion of actuator elements. Topographical modification of surfaces via surface patterning has emerged as a potential route to mitigate surface forces at small-scales.
Methods: Capillary force lithography is a simple yet robust technique to fabricate polymer nanostructures with varying shapes/sizes. This paper presents a brief review of the capillary force lithography technique, its salient features and tribological performance of nanostructures fabricated by the technique.
Conclusion: Capillary force lithography has several attractive salient features, in particular the ability of the technique to create polymer nanopatterns of varying shapes/sizes without the need for molds with different shapes/sizes. Polymer nanostructures fabricated by the technique effectively reduce surface forces at micro/nano-scales, and are of interest for tribological application in small-scale devices.
Keywords: Micro/nano devices, capillary force lithography, polymer, nanopatterns, adhesion, friction.
Graphical Abstract
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